MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS
摘要
A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
申请公布号
WO2007022500(A2)
申请公布日期
2007.02.22
申请号
WO2006US32567
申请日期
2006.08.18
申请人
TERAVICTA TECHNOLOGIES, INC.;YEE, IAN, Y., K.;FLYNN, WILLIAM, G.