发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SAME
摘要 <p>In a semiconductor device including a monocrystalline thin film transistor 16a that has been formed on a monocrystalline Si wafer 100 and then is transferred to a insulating substrate 2, LOCOS oxidization is performed with respect to the element-isolation region of the monocrystalline Si wafer 100 so as to create a field oxide film (SiO 2 film) 104, and a marker 107 is formed on the field oxide film 104. With this structure, alignment of components may be performed based on a gate electrode 106 upon or after the transfer step.</p>
申请公布号 KR100684189(B1) 申请公布日期 2007.02.20
申请号 KR20040084829 申请日期 2004.10.22
申请人 发明人
分类号 G02F1/1368;H01L29/786;H01L21/02;H01L21/336;H01L21/58;H01L21/60;H01L21/68;H01L21/76;H01L21/762;H01L21/77;H01L21/822;H01L21/84;H01L23/544;H01L27/06;H01L27/12;H01L29/423 主分类号 G02F1/1368
代理机构 代理人
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