| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic driving unit where formation of a deposit is little even in case that it is used under vacuum environment and the accuracy in positioning or the durability in long-distance drive does not drop. <P>SOLUTION: The ultrasonic motor 10 includes an abutting part 10a, and it is arranged in such a condition that this abutting part 10a abuts on the driving force transmitting face 4a of a sliding plate 4. The driving force transmitting face 4a of the sliding plate 4 is constituted of ceramic material where the average roughness (Ra) at the center line is ≤0.5 μm and pores not less than 3 μm in diameter are not more than 10,000 pieces per 1 mm<SP>2</SP>. On both sides of the ultrasonic motor 10, wiping members 13 and 14 for cleaning the driving fore transmitting face 4a of the sliding plate 4 are arranged in such a condition that they abut on the driving force transmitting face 4a of the sliding plate 4, so that they may catch the abutting part 10a. <P>COPYRIGHT: (C)2007,JPO&INPIT |
