发明名称 |
Microelectromechanical system comprising a beam that undergoes flexural deformation |
摘要 |
A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an approximately constant cross section. The beam consists of several flat faces that extend over the length of the beam, each having a thickness of less than an external dimension of the cross section. A flexural vibration frequency of the beam is then increased compared with a solid beam of the same external dimensions. Such a microelectromechanical system is suitable for applications requiring very short transition times, or for producing high-frequency oscillators and resonators.
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申请公布号 |
US2007035200(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
US20060388213 |
申请日期 |
2006.03.23 |
申请人 |
COMMISARIAT A L'ENERGIE ATOMIQUE |
发明人 |
CASSET FABRICE;SEGUENI KARIM;DE GRAVE ARNAUD;ABELE NICOLAS |
分类号 |
H01H57/00;C23F1/00;H02N1/00 |
主分类号 |
H01H57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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