| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head which realizes a favorable discharge, and is stably produced, and also to provide its manufacturing method. SOLUTION: A silicone compound is added to a protective film for protecting a device surface formed on a Si board from an etching fluid, and thus, the elasticity of the protective film is increased. A stress which is applied to the protective film by the growth of a hydrogen gas is absorbed by the deformation of the protective film, and the protective film is prevented from being broken. Thus, the generation of a poor patterning resulting from the breakage of the protective film is suppressed. COPYRIGHT: (C)2007,JPO&INPIT
|
