Pressure-sensitive adhesive sheet, production method thereof and method of processing articles

摘要

To provide a pressure-sensitive adhesive sheet for use in processing wafers and the like articles, that produces less cutting sludge of the pressure-sensitive adhesive sheet and that can follow up unevenness of a wafer even when a difference in height of the unevenness is large, the pressure-sensitive adhesive sheet includes a base having on one surface thereof an intermediate layer and a pressure-sensitive adhesive layer in order, wherein the intermediate layer has an initial elastic modulus of 0.5 N/mm² or less, a loss tangent (tandelta) at 20° C. to 70° C. of 0.4 or more, and a gel fraction of 30% or more