| 摘要 |
PROBLEM TO BE SOLVED: To provide an easy-to-manufacture and highly reliable heating device, and to provide a wafer prober mounted with the same. SOLUTION: The heating device comprises a mounting stand for mounting an article to be treated, and a heater for heating the mounting stand wherein the heater has a heating element formed on an insulating sheet. The heating element is preferably covered with a protective layer at least partially and it is preferably metal foil. The protective layer is preferably composed of heat-resistant rubber and the insulating sheet is composed of heat-resistant resin. COPYRIGHT: (C)2007,JPO&INPIT
|
