发明名称 |
CANTILEVER-TYPE PROBE AND METHOD OF FABRICATING THE SAME |
摘要 |
<p>Disclosed is a cantilever-type probe and methods of fabricating the same. The probe is comprised of a cantilever being longer lengthwise relative to the directions of width and height, and a tip extending from the bottom of the cantilever and formed at an end of the cantilever. A section of the tip parallel to the bottom of the cantilever is rectangular, having four sides slant to the lengthwise direction of the cantilever.</p> |
申请公布号 |
WO2007018367(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
WO2006KR03045 |
申请日期 |
2006.08.02 |
申请人 |
PHICOM CORPORATION;KIM, KI-JOON;JO, YONG-HWI |
发明人 |
KIM, KI-JOON;JO, YONG-HWI |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|