发明名称 CANTILEVER-TYPE PROBE AND METHOD OF FABRICATING THE SAME
摘要 <p>Disclosed is a cantilever-type probe and methods of fabricating the same. The probe is comprised of a cantilever being longer lengthwise relative to the directions of width and height, and a tip extending from the bottom of the cantilever and formed at an end of the cantilever. A section of the tip parallel to the bottom of the cantilever is rectangular, having four sides slant to the lengthwise direction of the cantilever.</p>
申请公布号 WO2007018367(A1) 申请公布日期 2007.02.15
申请号 WO2006KR03045 申请日期 2006.08.02
申请人 PHICOM CORPORATION;KIM, KI-JOON;JO, YONG-HWI 发明人 KIM, KI-JOON;JO, YONG-HWI
分类号 H01L21/66 主分类号 H01L21/66
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