TEST METHOD FOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To accurately and efficiently test the bonding of anode with a test method for an acceleration sensor formed by bonding glass to an anodic bonding pattern on a semiconductor chip.

SOLUTION: In the test method for an acceleration sensor formed by contacting an upper glass 33 to aluminum electrode 6 on a silicon substrate 1 of a sensor 10 and anodic-bonding, measurement terminals 6a and 6b are provided on both ends od the aluminum electrode 6. A probe 9 is applied to this and the resistance value between the front and the back of the anodic bonding is measured with a resistance meter 11. By comparing the measured resistance values, the test of bonding performance of the aluminum electrode 6 and the upper glass 3 can be done quantitatively, accurately and efficiently.

COPYRIGHT: (C)2007,JPO&INPIT