| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of providing an evaporator device in which high-boiling substances are converted into a gas phase, without applying too high heat radiation to a substrate to be coated. SOLUTION: An evaporator device is directed at coating substrates, in particular, at applying an aluminum layer of OLEDs (organic light-emitting diodes). To attain high evaporator tube temperatures, such as are required for example for the vaporization of materials with low vapor pressure, the heating system is placed into the interior of the evaporator tube. The thermal losses are thereby minimized and higher tube temperatures are possible at comparably coupled-in heating power. COPYRIGHT: (C)2007,JPO&INPIT
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