发明名称 ROTATIONAL MICRO MIRROR
摘要 A rotational micro mirror is provided to be used as a high-speed optical scanner with great driving angle and to minimize the deformation due to the high-speed driving of the mirror. A rotational micro mirror is composed of a substrate; a rotational reflection plate(10) reflecting the light; a pair of torsional springs(20,20') supporting the reflection plate from both ends to float the reflection plate from the substrate and functioning as a rotary shaft in rotating the reflecting plate; a pair of frames(30) connected with both sides of the reflection plate without linking with the torsional spring and symmetrically formed about the torsional spring; a frame support unit(60) connecting the reflection plate and the frame; and a driving unit having a moving comb(40) installed on the frame and a fixed comb installed on the substrate correspondently to the moving comb to generate electrostatic force.
申请公布号 KR100682961(B1) 申请公布日期 2007.02.08
申请号 KR20060006273 申请日期 2006.01.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JEONG, HEE MOON;LEE, JIN HO;CHO, JIN WOO
分类号 G02B26/08;G02B26/00 主分类号 G02B26/08
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