COATING FILM, COATING LIQUID FOR FORMING COATING FILM, METHOD OF FORMING COATING FILM AND ELECTRONIC COMPONENT HAVING COATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a coating film having a low relative permittivity which is completely cured at 350-500°C for a short time of≤10 min to shorten a heat treatment step. SOLUTION: The coating film exhibits relative permittivity of≤3.0 when the coating film is heat-treated under a condition of 350-500°C for the heating time of≤10 min and contains (a) a polycondensation reaction product having siloxane skeleton, (b) an organic polymer completely decomposed or volatilized at 250-500°C and (c) an organic polymer decomposition accelerator. COPYRIGHT: (C)2007,JPO&INPIT