发明名称 RADIATION ANALYZER AND RADIATION ANALYSIS METHOD, AND X-RAY MEASURING DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To solve the problems, wherein it has been difficult to calibrate sensitivity frequently to compensate deviation in energy sensitivity during measurement in TES, where characteristics change by variations in measurement environments, such as a bias current and a cooling temperature. SOLUTION: A radiation analyzer has a pulse signal application means 7, and applies a current pulse from the pulse signal application means to the output of a bias current supply means 52, thus applying pulse signals to TES1. Further, the radiation analyzer comprises an arithmetic processing unit 18 for measuring a wave-height spectrum output from a wave-height analyzer 4 for a plurality of times at a finite time interval for storage, deriving a sensitivity coefficient so that a peak position corresponding to the pulse signal of the stored wave-height spectrum coincides with an actual energy value, and calibrating sensitivity by using the derived sensitivity coefficient for giving an energy spectrum. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007033392(A) 申请公布日期 2007.02.08
申请号 JP20050220980 申请日期 2005.07.29
申请人 SII NANOTECHNOLOGY INC 发明人 MOROOKA TOSHIMITSU;IKEDA MASANORI;ISHIKAWA TATSUJI
分类号 G01N23/225;G01T1/26;G01T1/36 主分类号 G01N23/225
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