FILM FORMING APPARATUS,申请号KR20000076972-传众专利搜索

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发明名称	FILM FORMING APPARATUS
摘要
申请公布号	KR100680439(B1)	申请公布日期	2007.02.08
申请号	KR20000076972	申请日期	2000.12.15
申请人		发明人
分类号	H01L21/027;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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