发明名称 SILANE DERIVATIVE AND ORGANIC THIN FILM-FORMING ARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a silane derivative for forming organic thin films which can selectively convert the surfaces of substrates from a hydrophobic property into a hydrophilic property by the irradiation of low energy ultraviolet rays obtained from a low cost general purpose ultraviolet ray source, and to provide an organic thin film-forming article containing the silane derivative on the surface of a substrate. <P>SOLUTION: This silane derivative comprises a phenacyl group, and a halogen atom and/or an alkoxy group. An organic thin film obtained from the silane derivative is hydrophobic, but can be changed into a hydrophilic property by irradiating the organic thin film with ultraviolet rays having wavelengths of &ge;250 nm radiated from low cost mercury lamp light sources to photo-decompose the phenacyl group. The organic thin film is highly sensitive. Hence, the difference between the hydrophilic property and the hydrophobic property can be utilized to form various patterns on the surfaces of substrates. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007031319(A) 申请公布日期 2007.02.08
申请号 JP20050214397 申请日期 2005.07.25
申请人 TOYOBO CO LTD 发明人 IMAHASHI SATOSHI
分类号 C07F7/18;C08G77/14;G03F7/004;G03F7/075;H01L21/027 主分类号 C07F7/18
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