| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for speedily heating only thermoplastic resin or thermosetting resin to necessary temperature when the thermoplastic or thermosetting resin is used as an imprintable medium for imprint lithography in which a pattern fitted to a template is imprinted on a printable medium to be transferred to a substrate. SOLUTION: A thin metal layer 35 is provided on the pattern of the template 30 to be transferred, and the template 30 is brought into contact with the printable medium 34 and irradiated with a beam 37 of a laser 36 through the printable medium and a holder 31 holding it. The metal layer 35 efficiently absorbs the beam 37 and efficiently transfers the heat from the metal layer to the printable medium 34, so the printable medium 34 is speedily heated and the heat never enters a substrate 32 to strain the substrate. COPYRIGHT: (C)2007,JPO&INPIT |
