发明名称 |
Differential pressure sensor with drift reduction and hysteresis reduction and corresponding measuring method |
摘要 |
<p>Measuring device (100) has first pressure detection device (101) and second pressure detection device (201). They are arranged separately on a common substrate (302) in such a manner that thermo mechanical tensions in substrate as first and second pressure signals are seized, which are then compensated by differential pressure signal. An independent claim is included for the determination method for differential pressure.</p> |
申请公布号 |
EP1750110(A2) |
申请公布日期 |
2007.02.07 |
申请号 |
EP20060115273 |
申请日期 |
2006.06.12 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
MUCHOW, JOERG;JUNGER, ANDREAS;ULLRICH, GUENTHER-NINO-CARLO;GAMPP, RONALD;LEPIDIS, POLICHRONIS |
分类号 |
G01L13/02;G01L9/00;G01L9/06;G01L19/04 |
主分类号 |
G01L13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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