| 摘要 |
In a method of removing particles on an object, a fluid is injected into a spacer where the object is placed to remove foreign substances in the space. A first light is irradiated to the object to remove charges between an upper face of the object and the particles, and inner walls of holes and the particles. A second light is irradiated to the object to remove moisture droplets between the upper face of the object and the particles, and the inner walls of the holes and the particles. A third light is irradiated to the object to remove static electricity between the upper face of the object and the particles, and the inner walls of the holes and the particles. A fluid is applied to the upper face and the holes of the object to remove the particles from the object.
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