发明名称 VERTICAL P-N JUNCTION DEVICE AND METHOD OF FORMING SAME
摘要 A P-N junction device and method of forming the same are disclosed. The P-N junction device may include a P-N diode, a PiN diode or a thyristor. The P-N junction device may have a monocrystalline or polycrystalline raised anode. In one embodiment, the P-N junction device results in a raised polycrystalline silicon germanium (SiGe) anode. In another embodiment, the P-N junction device includes a first terminal (anode) including a semiconductor layer positioned above an upper surface of a substrate and a remaining structure positioned in the substrate, the first terminal positioned over an opening in an isolation region; and a second terminal (cathode contact) positioned over the opening in the isolation region adjacent the first terminal. This latter embodiment reduces parasitic resistance and capacitance, and decreases the required size of a cathode implant area since the cathode contact is within the same STI opening as the anode.
申请公布号 US2007023811(A1) 申请公布日期 2007.02.01
申请号 US20050161239 申请日期 2005.07.27
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 VOEGELI BENJAMIN T.;VOLDMAN STEVEN H.
分类号 H01L29/94;H01L27/108;H01L29/76;H01L31/119 主分类号 H01L29/94
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