| 摘要 |
A separation-type feed-through of an ion implanting apparatus is provided to maintain improved vacuum pressure by including three O-rings compressed in a direction from high pressure to low pressure. A housing(21) whose diameter decreases as it goes to the lower part of the housing is prepared in a separation-type feed-through. A track(26) is inserted into a first insulation member(28) wherein a screw thread is formed at the end of the track. When the first insulation member is coupled to the housing by external pressure while the track is inserted, a protrusion(29) is formed in the first insulation member to determine the exposure length of one end of the first insulation member. A groove(25) into which a first O-ring(22) is inserted is formed under the protrusion. While the exposed portion of the first insulation member is inserted into a hollow part of a second insulation member(30), one end of the second insulation member is inserted into the lower part of the housing. A plurality of protrusions are formed on the second insulation member. A high-voltage insertion member(35) is included in the feed-through, coupled to the screw thread formed in the track. A fixing member(34) is closely fixed to the inner wall of a chamber to support and insulate the chamber when the high-voltage insertion member is fixed to the track, fixedly coupled to one end of the high-voltage insertion member. A second O-ring(24) is inserted into the track to be closely coupled to the lower part of the second insulation member.
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