| 摘要 |
PROBLEM TO BE SOLVED: To provide an oil diffusion pump operated with optimal required electric power consumption and evacuation performance to various devices. SOLUTION: This electric power consumption reducing device is used for the oil diffusion pump exhausting suction gas by injecting a steam flow of a hydraulic fluid heated by a heater from a jet, and is constituted for intermittently cutting off electric power supplied to the heater on the basis of a control signal inputted in advance. COPYRIGHT: (C)2007,JPO&INPIT
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