| 发明名称 |
SEMICONDUCTOR DEVICE, TELEVISION SET, AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
<p>An object of the invention is to provide a method for manufacturing a substrate having a film pattern such as an insulating film, a semiconductor film, or a conductive film with an easy process, and further, a semiconductor device and a television set having a high throughput or a high yield at low cost and a manufacturing method thereof. One feature of the invention is that a first film pattern is formed by a droplet discharge method, a photosensitive material is discharged or applied to the first film pattern, a mask pattern is formed by irradiating a region where the first film pattern and the photosensitive material are overlapped with a laser beam and by developing, and a second film pattern having a desired shape is formed by etching the first film pattern using the mask pattern as a mask. ® KIPO & WIPO 2007</p> |
| 申请公布号 |
KR20070012352(A) |
申请公布日期 |
2007.01.25 |
| 申请号 |
KR20067017271 |
申请日期 |
2006.08.25 |
| 申请人 |
SEMICONDUCTOR ENERGY LABORATORY K.K. |
发明人 |
YAMAZAKI SHUNPEI;SHOJI HIRONOBU;ARAI YASUYUKI |
| 分类号 |
H01L29/786;G02F1/1362;H01L21/027;H01L21/336;H01L21/77;H01L21/84;H01L29/417 |
主分类号 |
H01L29/786 |
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