Polysilicon is formed by pyrolytic decomposition of a silicon-bearing gas and deposition of silicon onto fluidized silicon particles. Multiple submerged spout fluidized bed reactors (10) and reactors having secondary orifices (20) are disclosed.
申请公布号
WO2007012027(A2)
申请公布日期
2007.01.25
申请号
WO2006US28112
申请日期
2006.07.19
申请人
REC SILICON INC;EGE, PAUL, EDWARD;HANSEN, JEFFREY, A.;ALLEN, LEVI, C.
发明人
EGE, PAUL, EDWARD;HANSEN, JEFFREY, A.;ALLEN, LEVI, C.
