METHOD FOR PRODUCING ZINC OXIDE PHOSPHOR AND ITS UTILIZATION

摘要

PROBLEM TO BE SOLVED: To provide a method for readily producing a zinc oxide phosphor thin film having high brightness at a low temperature and low cost by using zinc chloride as a raw material and to provide a new inorganic EL element using the zinc oxide thin film as a luminescent layer and not using an additive element such as a rare earth. SOLUTION: The method for producing the zinc oxide phosphor comprises vaporizing zinc chloride by heating in an atmospheric gas containing an organic gas fed by control of discharge gas amount and depositing zinc oxide on a substrate. The new inorganic EL element uses zinc oxide thin film obtained by the method as the luminescent layer. COPYRIGHT: (C)2007,JPO&INPIT