BENZOXAZOLE PRECURSOR, RESIN COMPOSITION AND COATING VARNISH, RESIN FILM AND SEMICONDUCTOR DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a benzoxazole precursor which gives a varnish having good storage stability, and gives a resin film having a low dielectric constant and having various process suitabilities in combination as a resin film for a semiconductor device, and a resin composition containing the precursor. SOLUTION: The benzoxazole precursor is composed of a compound (C) having an o-aminophenyl group and a carboxylic acid group. The benzoxazole precursor is composed of a compound (A) having at least three o-aminophenyl groups. The benzoxazole precursor is composed of a compound (B) having at least two carboxylic acid groups. The resin composition comprises the benzoxazole precursor. The coating varnish is prepared by dissolving the benzoxazole precursor or the resin composition in an organic solvent. The resin film is composed of the benzoxazole precursor, the resin composition or the coating varnish. The semiconductor device comprises the resin film. COPYRIGHT: (C)2007,JPO&INPIT