| 摘要 |
A spectrometer based optical monitoring system is provided with a fiber optics transmission/reflection probe measuring in-situ data of a fixed and/or a rotational monitor. Single or multiple spectral bands are measured instantaneously by the spectrometer to monitor the thickness of each material layer as it is being applied. The single or multiple spectral band system will measure each layer and the total layers and compare the spectral bands of the two to the theoretical spectral designs over the measured region.
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