| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam irradiation device capable of detecting easily and accurately cracks generated along an axial direction and a circumferential direction of an inspection objective position, and a depth thereof. SOLUTION: This laser beam irradiation device of the present invention is provided with the first optical element 13 for emitting a reception laser beam L2 for inspection-measuring an inspection object toward the inspection object, the second optical element 14 for emitting a transmission laser beam L1 for exciting an ultrasonic wave toward the inspection object, and an optical system container 12 for storing the first optical element 13 and the second optical element 14, and a reflecting position of the first optical element 13 is arranged to have an angle along the circumferential direction of the inspection object with respect to a reflecting position of the second optical element 14. COPYRIGHT: (C)2007,JPO&INPIT
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