发明名称 WATER REMOVAL APPARATUS AND INSPECTION APPARATUS INCLUDING SAME
摘要 An apparatus for removing moisture in refrigerant and an inspection apparatus are provided to remove the moisture in the refrigerant without stopping the apparatus. An apparatus for removing moisture in refrigerant removes the moisture in the refrigerator while the refrigerant is circulating between a cooled body and a freezer via a circulation pipe. The apparatus includes a contour pipe(21), a heat exchanger(22), and a moisture absorbing material(23). Some of the refrigerant is taken from the circulation pipe and is contoured through the contour pipe. The heat exchanger is provided in the contour pipe and heats the refrigerant flowing through the contour pipe by using wasted heat of the freezer. The moisture absorbing material is disposed downstream of the heat exchanger to absorb the moisture in the refrigerant. First and second valves are provided upstream and downstream of the moisture absorbing material.
申请公布号 KR20070011109(A) 申请公布日期 2007.01.24
申请号 KR20060065635 申请日期 2006.07.13
申请人 TOKYO ELECTRON LIMITED 发明人 HATTA MASATAKA
分类号 F25B43/00;F25B1/00;F25B41/04 主分类号 F25B43/00
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