发明名称 |
Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof |
摘要 |
A process for producing a cold cathode field emission device. A cathode electrode is formed on a front surface of a support member that transmits exposure light. An insulating layer is formed on an entire surface. A gate electrode is formed on the insulating layer. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure. An electron-emitting-portion-forming-layer composed of a photosensitive material is formed at least inside the opening portion. The support member is irradiated with exposure light from a back surface side of the support member through the hole as a mask for exposure.
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申请公布号 |
US7166482(B2) |
申请公布日期 |
2007.01.23 |
申请号 |
US20050105538 |
申请日期 |
2005.04.14 |
申请人 |
SONY CORPORATION |
发明人 |
TOYOTA MOTOHIRO;SAITO ICHIRO;SHIMAMURA TOSHIKI;MUROYAMA MASAKAZU |
分类号 |
H01J9/02;H01L21/00;H01J1/02;H01J1/30;H01J1/304;H01J1/62;H01J9/00;H01J9/04;H01J9/12;H01J9/24;H01J29/04;H01J31/12;H01L21/8238 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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