发明名称 A METHOD TO BUILD ROBUST MECHAMICAL STRUCTUES ON SUBSTRATE SURFACES
摘要 A robust mechanical structure is provided to prevent small foundation structures formed on a substrate from detaching from the substrate surface. The strengthened structure is formed by plating a foundation metal layer on a seed layer and then embedding the plated foundation structure in an adhesive polymer material, such as epoxy. Components, such as spring probes, can then be constructed on the plated foundation. The adhesive polymer material better assures the adhesion of the metal foundation structure to the substrate surface by counteracting forces applied to an element, such as a spring probe, attached to the plated foundation. ® KIPO & WIPO 2007
申请公布号 KR20070010042(A) 申请公布日期 2007.01.19
申请号 KR20067022836 申请日期 2005.04.26
申请人 FORMFACTOR, INCORPORATED 发明人 GRUBE GARY W.;MATHIEU GAETAN L.;ELDRIDGE BENJAMIN N.;SOFIELD CHADWICK D.
分类号 H01L23/48;B32B9/00;B32B15/04;H01L21/60 主分类号 H01L23/48
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