| 摘要 |
PROBLEM TO BE SOLVED: To simplify constitution of a device, and to reduce an expense required for the device, in imaging inspection of a three-dimensional portion such as a a terminal edge part of a silicon wafer or a notch part provided in the terminal edge part. SOLUTION: This surface inspection device is constituted of one imaging means for imaging an inspection object, the first diffusion light illumination means formed into a domelike shape and provided with an observation window for the imaging means in its substantial top part, the second diffusion light illumination means for conducting emission coaxially to an optical axis of an optical system of the imaging means, an optical path refraction means for imaging an imaging-objective portion not faced to the imaging means, and an image processing means for computation-processing an imaged data imaged by the imaging means, and the plurality of portions of the inspection object having a three-dimensional shape is imaged at the same time by the one imaging means. COPYRIGHT: (C)2007,JPO&INPIT
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