| 摘要 |
The control of the spectral purity width E 95 is performed while imparting practically no effect to the control of a central wavelength, and the spectral purity width E 95 is stabilized. A wavefront adjuster 32 is provided on an output side of the interior of an optical resonator, i.e., on an output coupler 31 side. Light generated in a laser chamber 10 is transmitted through the wavefront adjuster 32 from the laser chamber 10 side, and reaches the output coupler 31 . In the wavefront adjuster 32 , the distance between concave and convex lenses 33 and 34 is adjusted so that a desired spectral purity width E 95 can be obtained. Then, when the light passes through the wavefront adjuster 32 , the wavefront of the light is adjusted to a desired wavefront.
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