| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce electrostatic induction noise generated by an effect of potential fluctuation of driving electrode on an electrode for rotation detection due to electrostatic induction, in an electromagnetically driven angular velocity sensor. <P>SOLUTION: Driving signals of opposite phases are supplied to both ends of the driving electrode 101, and the detection of induced electromotive force from both ends of the electrode 102 for rotation detection is differentially detected by a differential amplifier 104. Further, a weight 100 as a vibrating body is constituted by N or P type silicon, and is connected to a ground potential. Thus, a noise generated in a rotation detection electrode 102 by an electrostatic induction effect due to the potential fluctuation of the driving electrode 101 is suppressed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
