| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope illumination optical system capable of satisfactorily correcting chromatic aberration without making the whole optical system large in size. SOLUTION: Regarding the illumination optical system 1 including a light source 11 and a collector lens group 12 for condensing light emitted from the light source 11, a diffraction optical surface (diffraction optical element DOE) is arranged in the collector lens group 12 or near the collector lens group 12. COPYRIGHT: (C)2007,JPO&INPIT
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