ELEMENT SUBSTRATE, METHOD FOR INSPECTING THE SAME, AND METHOD FOR PREPARING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method that shortens an inspection time and reduces the complicatedness of an inspection in an inspection circuit using a plurality of evaluation oscillator circuits and an inspection method. SOLUTION: Inspections can be conducted with one measuring output terminal common to a plurality of the evaluation oscillator circuits integrally formed on the same substrate as in semiconductor device such as display. Dispersion in semiconductor devices can be evaluated by performing Fourier transform on the measured results to simultaneously obtain the oscillation frequencies of a plurality of the evaluation oscillation circuits. COPYRIGHT: (C)2007,JPO&INPIT