| 发明名称 |
Pad constructions for chemical mechanical planarization applications |
| 摘要 |
The present invention is directed to an abrasive article comprising a fixed abrasive layer and a subpad. The fixed abrasive element is co-extensive with the subpad. The subpad comprises a resilient element. The resilient element has a Shore A hardness of no greater than 60 as measured using ASTM-2240.
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| 申请公布号 |
US7163444(B2) |
申请公布日期 |
2007.01.16 |
| 申请号 |
US20030744761 |
申请日期 |
2003.12.23 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
KOLLODGE JEFFREY S.;LOESCH CHRISTOPHER N. |
| 分类号 |
B24B7/22;B24B37/04;B24B37/22;B24B37/24;B24D11/00;B24D13/14 |
主分类号 |
B24B7/22 |
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