| 摘要 |
An angular velocity sensor includes a tuning-fork-shaped substrate ( 1 ), drivers ( 110 ) that are provided on the arms forming a tuning fork and vibrate the arms; monitors ( 150 ) for detecting vibrations generated by the drivers ( 110 ); and detectors ( 120 ) for detecting displacement of vibrations made in application of an angular velocity. The drivers ( 110 ), the monitors ( 150 ), and the detectors ( 120 ) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
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