| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature distribution measuring instrument capable of compactifying a size of an instrument and capable of reducing a cost, while maintaining excellent precision. SOLUTION: This temperature distribution measuring instrument is provided with a sensor array 5 arranged in line with a plurality of elements for detecting an infrared ray, a step motor 3 for oscillating the sensor array 5 to detect the infrared ray planarly, a photon interrupter 7 for detecting an oscillation position of the sensor array 5, a control circuit 8 for controlling oscillation drive of the step motor 3 and for conducting control to make a moving speed lower than that in a detection range, when turned in both sides of the detection range, a casing 2 for covering the whole instrument and having a oscillation range opened for the sensor array 5, and a window part 21 for covering an opening of the casing 2 by an infrared ray transmitting member. COPYRIGHT: (C)2007,JPO&INPIT
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