| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer apparatus for transferring a semiconductor wafer without deteriorating transfer throughput in all conditions such that there is a vacant slot having no wafer in a wafer storage case, or that the number of stored wafers in the wafer storage case is not a multiple of the number of collectively transferable wafers, etc. SOLUTION: This semiconductor substrate transfer apparatus comprises at least one arm, and N pieces of end effectors for holding at least one semiconductor substrate. When substrate transfer processing is started, at least one desired end effector is selected from among the N end effectors in accordance with a substrate distribution state in a transfer source and the vacancy state of the slot in the transfer destination, the selected end effector and the other effectors are rotated independently from one another with respect to the arm, and the semiconductor substrate is transferred using the selected end effector. COPYRIGHT: (C)2007,JPO&INPIT
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