ROLLER BEARING UNIT AND APPARATUS FOR DELIVERING A SUBSTRATE USING THE SAME

摘要

A roller bearing unit and a substrate delivery apparatus using the same are provided to facilitate the exchange of a support member and to prevent liquid chemical from flowing in a bearing by exchanging a bearing cap. A substrate delivery apparatus using a roller bearing unit comprises plural delivery rollers delivering a substrate by rotating; and a support member(100) positioned to contact one side surface of the substrate when the substrate is delivered by the rotation of the delivery roller. The support member is composed of an inner race(122) fixed on the table for delivering the substrate; an outer race(128) surrounding the inner race, and having at least one fixing groove(129) on the external circumference surface; a ball socket(124) positioned between the inner race and the outer race, and contacted with the inner race and the outer race; and a bearing cap(130) having a side wall surrounding the external circumference surface of the outer race, and at least one fixing tip(132) inserted in the fixing groove on the internal circumference surface. The bearing cap combines with the outer race according as the fixing tip fit to the fixing groove.