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发明名称
WAFER CHUCK, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
EP1291910(B1)
申请公布日期
2007.01.10
申请号
EP20010946762
申请日期
2001.01.26
申请人
HITACHI TOKYO ELECTRONICS CO., LTD.
发明人
KOBAYASHI, SEIICHIRO;KOYANAGI, KOICHI;HONDA, TERUO;SAEKI, HIDEO;MOTOHASHI, MASAHARU
分类号
H01L21/68;B23Q3/08;B25B11/00;G03F7/20;H01L21/027;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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