A DELIVERY LIQUID INJECTION SYSTEM

摘要

A delivery liquid injection system is provided to reduce a total size by performing a cleaning process without using a solvent canister and a drain canister. A source canister(10) includes a first line(11) and a second line(12). A transfer gas line(L1) is used for supplying a transfer gas to the first line. A source transfer line(L2) is connected with the second line. An LFM(Liquid Flow Meter)(14) for controlling the amount of liquid source and an evaporator(15) for evaporating the liquid source controlled by the LFM are sequentially installed at a source transfer line. A cleaning gas transfer line(L3) is connected with the source transfer line between the first LFM and the second LFM. A first valve(V1) is installed at the cleaning gas transfer line. A bypass line(L5) is used for connecting an exhaust line(L4) connected with a chamber(C) and the transfer gas line. A second valve(V2) is installed at the bypass line. A purge gas transfer line(L6) is connected with the evaporator. A sixth valve(V6) is installed at the purge gas transfer line. A valve combination unit includes a third and fourth valves(V3,V4) installed at the first and second lines and a fifth valve(V5) installed at a third line(13).