| 摘要 |
<p>A reticle is provided to control effectively a polarized light irradiated onto a lens and to improve the resolution by using a transparent polarizing filter as a pellicle for covering a circuit pattern of a glass substrate. A reticle(10) includes a glass substrate and a pellicle. The glass substrate(20) has a circuit pattern at one side. The pellicle(30) is installed on the glass substrate in order to cover the circuit pattern of the glass substrate. A transparent polarizing filter is used as the pellicle. The pellicle is used for transforming the light irradiated from a light source into a linear type polarized light.</p> |
