| 摘要 |
A multi-purpose efficient charge particle detector that by switching bias voltages measures either secondary ions, or secondary electrons (SE) from a sample, or secondary electrons that originate from back scattered electrons (SE 3 ), is described. The basic version of the detector structure and two stripped down versions enable its use for the following detection combinations: 1. The major version is for measuring secondary ions, or secondary electrons from the sample, or secondary electrons due to back-scattered electrons that hit parts other than the sample together or without secondary electrons from the sample. 2. Measuring secondary ions or secondary electrons from the sample (no SE 3 ). 3. Measuring secondary electrons from the sample and/or secondary electrons resulting from back-scattered electrons hitting objects other than the sample (no ions).
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