发明名称 Probe for e.g. integrated circuit, has contact tips located within periphery of coaxial cable and shielded by ground conductor of coaxial cable, where coaxial cable terminates in oblique terminal section
摘要 <p>The probe has a coaxial cable (50) terminated in an oblique terminal section and including an axially extending conductor and a coaxial conductor. A dielectric substrate is affixed to the coaxial cable with one side proximate to the section and another side remote from the section. A set of contact tips (28) is located within the periphery of the coaxial cable, and shielded by a ground conductor of the coaxial cable. A conductive unit connects the former conductor to a contact, where the contact is engagable with a device to be tested.</p>
申请公布号 DE102006026229(A1) 申请公布日期 2006.12.28
申请号 DE20061026229 申请日期 2006.06.06
申请人 CASCADE MICROTECH INC. 发明人 CAMPBELL, RICHARD L.;ANDREWS, MICHAEL;BUI, LYNH
分类号 G01R31/28;G01R1/067;H01L21/66 主分类号 G01R31/28
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