发明名称 |
Probe for e.g. integrated circuit, has contact tips located within periphery of coaxial cable and shielded by ground conductor of coaxial cable, where coaxial cable terminates in oblique terminal section |
摘要 |
<p>The probe has a coaxial cable (50) terminated in an oblique terminal section and including an axially extending conductor and a coaxial conductor. A dielectric substrate is affixed to the coaxial cable with one side proximate to the section and another side remote from the section. A set of contact tips (28) is located within the periphery of the coaxial cable, and shielded by a ground conductor of the coaxial cable. A conductive unit connects the former conductor to a contact, where the contact is engagable with a device to be tested.</p> |
申请公布号 |
DE102006026229(A1) |
申请公布日期 |
2006.12.28 |
申请号 |
DE20061026229 |
申请日期 |
2006.06.06 |
申请人 |
CASCADE MICROTECH INC. |
发明人 |
CAMPBELL, RICHARD L.;ANDREWS, MICHAEL;BUI, LYNH |
分类号 |
G01R31/28;G01R1/067;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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