发明名称 ULTRAVIOLET IRRADIATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device which can achieve a large dose of ultraviolet ray by efficiently utilizing lights emitting from a short-arc type discharge lamp as a light source lamp, as well as a large dose of light even in a range of wavelemngth of 350 nm or less in ultraviolet. SOLUTION: The ultraviolet irradiation device is provided with a concave reflection mirror (hereinafter called as mirror), a front glass provided in the direction of light projection of the light projection port of the mirror, and a short-arc type discharge lamp (hereinafter called as lamp) with a mercury enclosed therein. The lamp is arranged in a manner that the focus of the mirror may coincide with a center between lamp electrodes and the optical axis of the mirror may also coincide with the arc axis of the lamp. The mirror is provided with a reflection surface that reflects 80% or more of lights in a specific wavelength range and 50% or more of lights in another specific wavelength range. The front glass has a transmission factor of at least 50% or more to lights in a specific wavelength range, and it reflects at least 50% or more of lights in another specific wavelength range. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006351670(A) 申请公布日期 2006.12.28
申请号 JP20050173428 申请日期 2005.06.14
申请人 USHIO INC 发明人 KAMEI HIROICHI;MORI KAZUYUKI;KABURAGI KIYOYUKI;SUGITANI AKIHIKO
分类号 H01L21/027;B05C9/14 主分类号 H01L21/027
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