摘要 |
PROBLEM TO BE SOLVED: To provide a surface light-emitting semiconductor laser device sealed by a long life resin which prevents a VCSEL from the deterioration of laser characteristics. SOLUTION: The semiconductor laser device 1 is provided with the VCSEL comprising a mesa 12 and an outer peripheral unit 16 separated from the mesa 12 by a trench groove 14 formed around the mesa 12, and translucent resin 18 filled into the trench groove 14. In order to mitigate the thermal stress of the resin in the trench groove 14, a plurality of grooves 20 extended into a direction orthogonal to the substrate are formed on the side wall of the outer peripheral unit 16 opposed to the mesa 12. COPYRIGHT: (C)2007,JPO&INPIT
|