VACUUM PROCESSING SYSTEM AND VALVE DOOR FOR USE IN THE VACUUM PROCESSING SYSTEM,申请号KR20007000311-传众专利搜索

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发明名称	VACUUM PROCESSING SYSTEM AND VALVE DOOR FOR USE IN THE VACUUM PROCESSING SYSTEM
摘要
申请公布号	KR100662129(B1)	申请公布日期	2006.12.27
申请号	KR20007000311	申请日期	2000.01.11
申请人		发明人
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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