| 摘要 |
A control display module for a robot calibration of CVD(Chemical Vapor Deposition) equipment capable of displaying a working area is provided to prevent wafer breakdown and robot damage by exactly recognizing user's working area. A robot calibration CDM(Control Display Module) includes plural selecting keys(130), a display window(120), a CPU(Central Processing Unit), and an emergency stop key(110). The selecting keys select a work menu for robot calibration. The display window displays the work menu according to an operation of the selecting key from the beginning in procedures. The CPU controls the selecting key and the display window. The emergency stop key stops the control when a problem occurs in working.
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