| 摘要 |
A throttle valve for controlling pressure of semiconductor manufacturing equipment is provided to prevent work fail of the throttle valve by dismounting an extra O-ring on a circumference of a flapper. A fluid path(111) is formed in a housing(110). A flapper(120) opens and shuts the fluid path as rotating in the fluid path. A rotation axis(130) passes through the housing and is coupled to the flapper to rotate the flapper. A driving motor supplies rotational force in the rotation axis. A joint unit(150) connects the housing to the driving motor. The fluid path and the flapper have circular surfaces. A diameter of the inside of the circular surface in the fluid path is smaller than the outside thereof. The housing is made of alumina(Al2O3). The flapper is made of one of SUS(Steel special Use Stainless)-440a,440b, and 440c.
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